OSU Owen Cleanroom
Campus-shared photolithography facilities and thin-film deposition systems (including direct write laser lithography and focussed ion beam lithography) are used to create new devices. View an overview of the Oregon State University Owen Cleanroom click here
Highlighted Shared Instrument
OSU’s Heidleberg 66FS direct write lithography tool has been installed for nearly 2 years.
The tool has been a great success and already has 22 users.
Users include, Inpria an ONAMI Gap Company.
Inpria is commercializing inorganic printed and spin-on materials for high-performance, low-cost printed electronics
OSU users come from 7 disciplines and 10 research groups:
Physics
Chemistry
Electrical Engineering
Mechanical Industrial and Manufacturing Engineering
Chemical Engineering
Wood Science
Material Science
For more information about how to access the Heidleberg 66FS and other tools in the OSU cleanroom contact:
Chris Tasker .(JavaScript must be enabled to view this email address) 541-737-2976
Oregon State University Electron Microscopy and Imaging Facility
At Oregon State University (OSU), the Electron Microscopy and Imaging Facility provides service to the research community of both life sciences and materials science related studies. The facility, located in Cordley Hall, was established in the Department of Botany and Plant Pathology in 1967, and has been in continuous operation.
In addition to supporting faculty and students the facility welcomes external academic and government institutions and industry.
Currently the facility maintains and operates FEI Quanta 3D field emission environmental dual beam scanning electron microscope (SEM/FIB), Quanta 600F field emission environmental SEM, Nova NanoSEM 230 (FESEM) and Philips CM12 scanning transmission electron microscope (STEM). These instruments are all equipped with energy dispersive spectrometry (EDS).
OSEM is now located at the Linus Pauling Science Center, 145 Linus Pauling Science Center, 2900 SW Campus Way-Oregon State University, Corvallis, OR 97331
Visit Oregon State’s EM and Imaging Facility website
Look for additional announcements regarding the new Titan 80-200 high resolution TEM and facility open house in April 2012.
For more information contact:
Dr. Yi Liu
.(JavaScript must be enabled to view this email address)
541-737-5645
Capabilities-at-a-Glance
Center for Electron Microscopy and Nanofabrication
CEMN at Portland State University (PSU) provides researchers with state-of-the-art facilities for the characterization of nanoscale materials and devices. SEM, TEM and FIB instruments and training expertise to are available to the industry and university communities.
The facility also includes nanofabrication equipment including carbon nanotube and semiconductor nanowire deposition reactors, plasma etching , and lithography tools. A semiconductor analyzer and probe station are available for testing specimen electrical properties.
Visit CEMN’s webpage.
Learn about the Business Oregon-ONAMI Facility Matching Grant Program for New Users at: http://www.onami.us/index.php/nano-network/matching_grant_program.
Facilities
ONAMI’s signature research facilities are first class materials characterization and fabrication laboratories open to outside users: Center for Electron Microscopy and Nanofabrication (CEMN); Center for Advanced Materials Characterization (CAMCOR); OSU Electron Microscopy and Imaging Facility; OSU Owen Cleanroom and the Microproducts Breakthrough Institute (MBI).
They collaborate with small and large companies to develop nano and microtechnology solutions. The facilities, on a pay for service basis, enable those that do not have equipment or need extra bandwidth, access to high cost capital equipment and technical expertise. They fulfill time critical needs during production ramp and intense phases of research and development.
Users include biotech, semiconductor, solar, wood products, defense and advanced materials companies, universities and consultants.
Learn about the Business Oregon-ONAMI Facility Matching Grant Program for New Users at: http://www.onami.us/index.php/nano-network/matching_grant_program.
Microproducts Breakthrough Institute
The Microproducts Breakthrough Institute (MBI) is a Microtechnology Systems fabrication facility located on the Hewlett Packard campus in Corvallis, Oregon. The facility is a powerful collaboration between Oregon State University (OSU) and Pacific Northwest National Laboratory (PNNL) where everything from basic research to product commercialization is supported. The MBI is open to outside users and interaction with industry is encouraged. The MBI collaborates with small and large companies to develop nano and microtechnology solutions, from efficient jet engines to a portable dialysis appliance.
Visit MBI’s website.
Learn about the Business Oregon-ONAMI Facility Matching Grant Program for New Users at: http://www.onami.us/index.php/nano-network/matching_grant_program.
Center for Advanced Materials Characterization
CAMCOR is a full-service, comprehensive materials characterization center at the University of Oregon open to outside clients. CAMCOR houses capital-intensive equipment for microanalysis, surface analysis, electron microscopy, semiconductor device fabrication, as well as traditional chemical characterization. The staff members who run the facilities are expertly trained and highly experienced in sample preparation, data collection and data analysis.
See a complete list of CAMCOR’s capabilities. Click Here!
Visit CAMCOR’s website
Direct Write Lithography System Capabilities
The DWL exposes patterns in photoresist for microfabrication of electronic, photonic and micromechanical devices.
The figure below shows the mask writing process performed on the DWL and subsequent photolithography process.
The DWL 66FS is configured to support the following specifications:
- 0.6 micron resolution
- Substrates up to 200 mm
- Lithographic masks or direct write on substrates
- Alignment of patterns
- Back-side alignment for MEMS
Learn about equipment available for industry use.
Learn about
the Business Oregon-ONAMI Facility Matching Grant Program for New Users at:
For more information
about how to start a project at CAMCOR or for a facility tour contact:
Melodi Jayne- Lab Manager
.(JavaScript must be enabled to view this email address)
541-346-6447
See the faces of CAMCOR. Click Here!
Polymer Characterization Highlighted
Polymer characterization and research is a growing discipline at the University of Oregon. The Polymer Characterization Laboratory is equipped to characterize materials with regard to their thermal properties and, for polymeric materials, their molecular weight (distribution) and size (in solution). Polymer Characterization is lead by Dr. Richard Chartoff, .(JavaScript must be enabled to view this email address), 541-346-2493. Learn more about Richard’s expertise in the attached pdf.
Polymer Research-3.9MB
Above: Atomic Force Microscopy 3D image of the surface of a nanocomposite showing well dispersed PbS nanoparticles.