Helios DualBeam
Facility: Center For Advanced Materials Characterization in Oregon (CAMCOR)

High resolution FIB/SEM for site specific cross-sections and TEM sample preparation. Configured with cryo and Omniprobe in-situ liftout and STEM capabilities. Oxide and Carbon selective etch, Platinum deposition chemistries.

Function
CDEM detector
cross section imaging
cryo
imaging
Pt deposition
sample etching
TEM specimen preparation
XeF2

Technique
focused ion beam
SEM
STEM

Contact Center For Advanced Materials Characterization in Oregon (CAMCOR)

Name: Email: Phone: Reason: Note: Functions: CDEM detector cross section imaging cryo imaging Pt deposition sample etching TEM specimen preparation XeF2 Techniques: focused ion beam SEM STEM