FEI Sirion XL30 SEM
Facility: Center for Electron Microscopy and Nanofabrication (CEMN)

Field emission scanning electron microscopy with Oxford EDS. 50X50 mm sample stage.

Function
CCD camera
cross section imaging
digital image recording
elemental analysis
elemental mapping
Everhart-Thornley
five axis stage
high resolution
line scanning
low voltage
Oxford INCA EDS
secondary electron detector
spectrum mapping
three dimensional imaging
ultrahigh resolution

Technique
field emission
scanning transmission electron microscope
SEM
STEM

Contact Center for Electron Microscopy and Nanofabrication (CEMN)

Name: Email: Phone: Reason: Note: Functions: CCD camera cross section imaging digital image recording elemental analysis elemental mapping Everhart-Thornley five axis stage high resolution line scanning low voltage Oxford INCA EDS secondary electron detector spectrum mapping three dimensional imaging ultrahigh resolution Techniques: field emission scanning transmission electron microscope SEM STEM