FEI Strata DB-STEM 237 DualBeam FIB
Facility: Center for Electron Microscopy and Nanofabrication (CEMN)
FIB/SEM tool used for ion milling cross-sections and making TEM samples
Function
bright field
CCD camera
CDEM detector
dark field
digital image
elemental analysis
Everhart-Thornley secondary electron detector
five axis stage
high resolution
high-angle dark field STEM imaging
liquid Gallium ion emitter
Pt deposition
sample etching
sample pluck-out
secondary electron detector
spectrum mapping
TEM specimen preparation
ultrahigh resolution
XeF2
Technique
FIB
field emission
OMNI probe
scanning transmission electron microscope
STEM
TEM
transmission electron microscope
