Scanning Auger Microscope, PHI Model 670 with 680 upgrade
Facility: Center For Advanced Materials Characterization in Oregon (CAMCOR)

Function
12 nm ultimate beam diameter
chemical bonding information
depth profiling
elemental analysis
imaging
secondary electron imaging

Technique
Auger
electron spectroscopy
SAM
Scanning Auger Microscopy

Contact Center For Advanced Materials Characterization in Oregon (CAMCOR)

Name: Email: Phone: Reason: Note: Functions: 12 nm ultimate beam diameter chemical bonding information depth profiling elemental analysis imaging secondary electron imaging Techniques: Auger electron spectroscopy SAM Scanning Auger Microscopy