Zeiss Ultra-55 SEM scanning electron microscope
Facility: Center For Advanced Materials Characterization in Oregon (CAMCOR)

Scanning Electron Microscope with 2 nm resolution and "InLens" SE and BSE energy selective detection for nano-particle characterization. Also Oxford Inca 30mm^2 EDS detector with SmartMap/Cameo spectrum imaging. System also has a v. 9 Nabity electron beam lithography system for nano-pattern generation and a Fjeld faraday cup and Raith electrostatic beam blanker for controlled dosage of PMMA deposited substrates.

Function
backscatter
BSE
e-beam lithography
EDS
electron imaging
energy dispersive X-ray
Everhart-Thornley
high resolution imaging
low voltage
SE
secondary electron
x-ray mapping

Technique
FEG
scanning electron microscope
SEM
thermal field emission

Contact Center For Advanced Materials Characterization in Oregon (CAMCOR)

Name: Email: Phone: Reason: Note: Functions: backscatter BSE e-beam lithography EDS electron imaging energy dispersive X-ray Everhart-Thornley high resolution imaging low voltage SE secondary electron x-ray mapping Techniques: FEG scanning electron microscope SEM thermal field emission