Cameca SX100 Electron Microanalyzer
Facility: Center For Advanced Materials Characterization in Oregon (CAMCOR)

Electron Probe Micro Analyzer with 5 WDS spectrometers, SE, BSE and cathodo-luminescence (CL) imaging for high accuracy (<2%) quantitative elemental analysis and x-ray mapping. Two spectrometers are four crystal spectrometers for simultaneous light elements and two spectrometers are equipped with large area crystals for increased sensitivity without an reduction in spectral resolution. Probe also has a Thermo System Six EDS digital system for x-ray mapping and Compass/XPhase spectrum imaging. Runs PeakSight and Probe for Windows software for advanced automation and analysis.

Function
backscatter
BSE
cathodo-luminescence
CL
elemental analysis
energy dispersive
imaging
microanalysis
SE
secondary
spectrum imaging
thin film analysis
trace analysis
wavelength dispersive
x-ray mapping

Technique
electron microprobe
electron probe
EPMA
microanalyzer

Contact Center For Advanced Materials Characterization in Oregon (CAMCOR)

Name: Email: Phone: Reason: Note: Functions: backscatter BSE cathodo-luminescence CL elemental analysis energy dispersive imaging microanalysis SE secondary spectrum imaging thin film analysis trace analysis wavelength dispersive x-ray mapping Techniques: electron microprobe electron probe EPMA microanalyzer